Onto Innovation Inc. (ONTO) Cash Flow Statement

NYSE: ONTOOperating cash, capex, free cash flow and buybacks.

Where ONTO’s cash came from and went, 2025

December 31, 2025 · U.S. dollars
Cash from operations
$328.3M
+33.6% vs 2024
Capital expenditures
$28.5M
2.8% of revenue
Free cash flow
$299.8M
29.8% margin
Returned to shareholders
$75.0M
25% of free cash flow
Change in cash
$133.2M
cash at year-end $346.1M
Cash from operations: $328.3MCash from operations$328.3MInvestments (net): $343.1MInvestments (net)$343.1MCurrency & other: $1.4MCurrency & other$1.4MAcquisitions & other: $436.1MAcquisitions & other$436.1M · 65%Share buybacks: $75.0MShare buybacks$75.0M · 11%Capital expenditures: $28.5MCapital expenditures$28.5M · 4%Added to cash: $133.2MAdded to cash$133.2M · 20%$672.8M
Cash from operations
$328.3M
Capital expenditures
−$28.5M
Investments (net)
+$343.1M
Acquisitions & other
−$436.1M
Share buybacks (net)
−$75.0M
Currency & other
+$1.4M
Change in cash
$133.2M

Drawn to scale: where the cash came from and how it was used. Hover for values.

ONTO operating cash flow, capex and free cash flow

Operating cash flowCapital expendituresFree cash flowFCF margin (right axis)

ONTO cash flow trends, 2016–2025

Onto Innovation Inc. cash flow trends
MetricTrendThenLatestChange
Operating cash flow$46.6M2016$328.3M2025+24.2%/yr
Capital expenditures$5.3M2016$28.5M2025+20.6%/yr
Free cash flow$41.3M2016$299.8M2025+24.6%/yr
Free cash flow margin17.8%201629.8%2025+12.1 pts
Operating cash flow / net income1.2620162.402025+1.14
Stock-based compensation$4.8M2016$27.6M2025+21.5%/yr
Share buybacks (net)$8.0M2016$75.0M2025+28.2%/yr
Capex / revenue2.3%20162.8%2025+0.6 pts

Change is the average annual growth (CAGR) or the difference between the first and latest year.

ONTO cash flow by activity

OperatingInvestingFinancingChange in cash

ONTO net income vs operating cash flow

Net incomeOperating cash flow

Operating cash flow above net income usually means earnings are backed by cash (depreciation and stock-based pay are non-cash expenses).

ONTO cash flow statement

Onto Innovation Inc. annual cash flow statement
2025202420232022202120202019201820172016
Operating activities
Net income$136.8M$201.7M$121.2M$223.3M$142.3M$31.0M$1.9M$45.1M$32.9M$37.0M
Depreciation & amortization$60.4M$62.3M$67.2M$64.7M$65.8M$67.6M$16.4M$6.4M$5.9M$6.0M
Stock-based compensation$27.6M$28.6M$25.5M$24.4M$19.5M$17.7M$10.6M$6.1M$5.7M$4.8M
Change in working capital$52.0M−$44.5M−$32.5M−$156.5M−$50.6M−$28.7M−$35.3M−$29.2M−$1.5M−$11.0M
Other non-cash items$51.5M−$2.4M−$9.4M−$19.2M−$1.8M$18.5M$24.6M$6.8M$21.4M$10.0M
Cash from operating activities$328.3M$245.7M$172.0M$136.7M$175.3M$106.0M$18.1M$35.1M$64.4M$46.6M
Investing activities
Capital expenditures−$28.5M−$31.9M−$22.6M−$18.4M−$12.0M−$3.8M−$6.8M−$7.5M−$11.2M−$5.3M
Investments (net)$343.1M−$226.5M−$92.7M−$32.6M−$106.0M−$47.6M−$33.0M$41.5M$514,000−$38.1M
Acquisitions & other investing−$436.1M$31.9M$11.9M−$4.6M−$23.8M$2.8M$43.9M−$142,000−$21.8M$67.9M
Cash from investing activities−$121.6M−$226.5M−$103.4M−$55.7M−$141.8M−$48.6M$4.1M$33.8M−$32.5M$24.5M
Financing activities
Share repurchases & issuance (net)−$75.0M−$25.1M−$3.2M−$65.3M−$7.4M−$52.0M−$744,000−$21.1M−$1.4M−$8.0M
Net borrowing (repayment)—————————−$60.0M
Shares issued$0$0$0$0$6.5M$2.9M$844,000$624,000$0$0
Other financing−$135,000−$10.6M−$6.3M−$3.1M$3.6M−$4.6M−$4.3M−$3.5M−$1.4M−$10.1M
Cash from financing activities−$75.2M−$35.7M−$9.5M−$68.3M$2.7M−$53.7M−$4.2M−$23.9M−$2.8M−$78.1M
Summary
Net change in cash$133.2M−$20.6M$57.6M$6.3M$32.9M$6.0M$18.3M$44.6M$29.9M−$6.7M
Cash at end of period$346.1M$212.9M$233.5M$175.9M$169.6M$136.7M$130.7M$112.4M$67.8M$37.9M
Free cash flow$299.8M$213.8M$149.4M$118.3M$163.2M$102.2M$11.3M$27.6M$53.2M$41.3M
Free cash flow margin29.8%21.7%18.3%11.8%20.7%18.4%3.7%10.1%20.8%17.8%
Capex / revenue2.8%3.2%2.8%1.8%1.5%0.7%2.2%2.8%4.4%2.3%
Operating cash flow / net income2.401.221.420.611.233.429.500.781.961.26

Negative numbers are cash paid out. Quarterly columns are labeled by the month the quarter ended. Figures in U.S. dollars as reported; data from EODHD.

ONTO cash generation

In fiscal 2025 (ended December 31, 2025), Onto Innovation generated $328.3 million of cash from operations (up 33.6%) and spent $28.5 million on capital expenditures, leaving free cash flow of $299.8 million, 29.8% of revenue. It returned $75.0 million to shareholders through dividends ($0) and net share buybacks ($75.0 million). Cash and equivalents rose by $133.2 million over the year.

Related: ONTO income statement, ONTO balance sheet. See the ONTO stock overview for the latest quote and news.

ONTO cash flow FAQ

What is Onto Innovation's free cash flow?

Onto Innovation's free cash flow was $299.8 million in fiscal 2025: $328.3 million of operating cash flow minus $28.5 million of capital expenditures It was $213.8 million a year earlier..

How much cash does Onto Innovation generate from operations?

Onto Innovation generated $328.3 million of cash from operating activities in fiscal 2025, 2.40 times its net income of $136.8 million.

How much does Onto Innovation spend on capital expenditures?

Onto Innovation spent $28.5 million on capital expenditures in fiscal 2025, 2.8% of revenue, compared with $31.9 million the year before.

How much stock does Onto Innovation buy back?

Onto Innovation spent $75.0 million on net share repurchases in fiscal 2025.

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