ASML Holding N.V. (ASML) Cash Flow Statement

NASDAQ: ASMLOperating cash, capex, free cash flow and buybacks.

Where ASML’s cash came from and went, 2025

December 31, 2025 · euros
Cash from operations
€12.66B
+13.4% vs 2024
Capital expenditures
€1.57B
4.8% of revenue
Free cash flow
€11.08B
33.9% margin
Returned to shareholders
€8.50B
77% of free cash flow
Change in cash
€180.1M
cash at year-end €12.92B
Cash from operations: €12.66BCash from operations€12.66BShares issued: €142.3MShares issued€142.3MShare buybacks: €5.95BShare buybacks€5.95B · 46%Dividends: €2.55BDividends€2.55B · 20%Investments (net): €1.70BInvestments (net)€1.70B · 13%Capital expenditures: €1.57BCapital expenditures€1.57B · 12%Acquisitions & other: €501.1MAcquisitions & other€501.1M · 4%Debt repayment, Added to cash: €492.6MOther uses€492.6M · 4%€12.80B
Cash from operations
€12.66B
Capital expenditures
−€1.57B
Investments (net)
−€1.70B
Acquisitions & other
−€501.1M
Dividends
−€2.55B
Share buybacks (net)
−€5.95B
Net borrowing (repayment)
−€312.5M
Shares issued
+€142.3M
Change in cash
€180.1M

Drawn to scale: where the cash came from and how it was used. Hover for values.

ASML operating cash flow, capex and free cash flow

Operating cash flowCapital expendituresFree cash flowFCF margin (right axis)

ASML cash flow trends, 2016–2025

ASML Holding N.V. cash flow trends
MetricTrendThenLatestChange
Operating cash flow€1.67B2016€12.66B2025+25.3%/yr
Capital expenditures€324.7M2016€1.57B2025+19.2%/yr
Free cash flow€1.34B2016€11.08B2025+26.4%/yr
Free cash flow margin19.5%201633.9%2025+14.4 pts
Operating cash flow / net income1.1320161.322025+0.19
Stock-based compensation€47.7M2016€202.3M2025+17.4%/yr
Dividends paid€445.9M2016€2.55B2025+21.4%/yr
Share buybacks (net)€400.0M2016€5.95B2025+35.0%/yr
Capex / revenue4.7%20164.8%2025+0.1 pts

Change is the average annual growth (CAGR) or the difference between the first and latest year.

ASML cash flow by activity

OperatingInvestingFinancingChange in cash

ASML net income vs operating cash flow

Net incomeOperating cash flow

Operating cash flow above net income usually means earnings are backed by cash (depreciation and stock-based pay are non-cash expenses).

ASML cash flow statement in euros

ASML Holding N.V. annual cash flow statement
2025202420232022202120202019201820172016
Operating activities
Net income€9.61B€7.57B€7.84B€5.62B€5.88B€3.55B€2.59B€2.53B€2.12B€1.47B
Depreciation & amortization€1.03B€918.6M€786.2M€557.3M€432.8M€551.9M€521.2M€422.7M€417.5M€356.9M
Stock-based compensation€202.3M€172.6M€134.8M€68.9M€117.5M€53.9M€74.6M€48.3M€53.1M€47.7M
Change in working capital€1.03B€2.05B−€3.66B€2.21B€3.29B€1.22B€538.6M−€53.1M−€939.3M−€294.9M
Other non-cash items€794.4M€450.1M€347.0M€22.6M€1.12B−€750.7M−€450.3M€358.1M€148.8M€84.3M
Cash from operating activities€12.66B€11.17B€5.44B€8.49B€10.85B€4.63B€3.28B€3.30B€1.80B€1.67B
Investing activities
Capital expenditures−€1.57B−€2.08B−€2.20B−€1.28B−€900.7M−€962.0M−€766.6M−€838.3M−€358.0M−€324.7M
Investments (net)−€1.70B−€2.61B−€2.44B−€1.03B€663.7M−€1.35B−€1.16B−€491.5M−€1.21B−€3.19B
Acquisitions & other investing−€501.1M€2.08B€1.94B€1.28B€165.0M€962.0M€766.6M€609.5M€358.0M€324.8M
Cash from investing activities−€3.78B−€2.61B−€2.69B−€1.03B−€72.0M−€1.35B−€1.16B−€720.3M−€1.21B−€3.19B
Financing activities
Dividends paid−€2.55B−€2.45B−€2.35B−€2.56B−€1.37B−€1.07B−€1.33B−€597.1M−€516.7M−€445.9M
Share repurchases & issuance (net)−€5.95B−€500.0M−€1.00B−€4.64B−€8.56B−€1.21B−€410.0M−€1.15B−€500.0M−€400.0M
Net borrowing (repayment)−€312.5M−€3.2M€245.0M−€20.6M−€12.0M€1.48B−€3.8M−€2.8M−€243.0M€2.23B
Shares issued€142.3M€124.0M€92.4M€81.8M€49.0M€37.9M€27.2M€21.8M€0€0
Other financing€0€0€7.0M−€55.0M−€100,000€0−€73.1M€0€50.6M€583.6M
Cash from financing activities−€8.67B−€2.83B−€3.00B−€7.19B−€9.89B−€753.0M−€1.79B−€1.72B−€1.21B€1.96B
Summary
Net change in cash€180.1M€5.73B−€263.6M€316.5M€902.4M€2.52B€411.2M€862.1M−€647.9M€448.2M
Cash at end of period€12.92B€12.74B€7.00B€7.27B€6.95B€6.05B€3.53B€3.12B€2.26B€2.91B
Free cash flow€11.08B€9.08B€3.25B€7.20B€9.95B€3.67B€2.51B€2.46B€1.44B€1.34B
Free cash flow margin33.9%32.1%11.8%34.0%53.4%26.2%21.2%22.5%16.1%19.5%
Capex / revenue4.8%7.4%8.0%6.1%4.8%6.9%6.5%7.7%4.0%4.7%
Operating cash flow / net income1.321.470.691.511.841.301.261.310.851.13

Negative numbers are cash paid out. Quarterly columns are labeled by the month the quarter ended. Figures in euros as reported; data from EODHD.

ASML cash generation

In fiscal 2025 (ended December 31, 2025), ASML generated €12.7 billion of cash from operations (up 13.4%) and spent €1.6 billion on capital expenditures, leaving free cash flow of €11.1 billion, 33.9% of revenue. It returned €8.5 billion to shareholders through dividends (€2.6 billion) and net share buybacks (€6.0 billion). Cash and equivalents rose by €180.1 million over the year.

Related: ASML income statement, ASML balance sheet, ASML dividend history. See the ASML stock overview for the latest quote and news.

ASML cash flow FAQ

What is ASML's free cash flow?

ASML's free cash flow was €11.1 billion in fiscal 2025: €12.7 billion of operating cash flow minus €1.6 billion of capital expenditures It was €9.1 billion a year earlier..

How much cash does ASML generate from operations?

ASML generated €12.7 billion of cash from operating activities in fiscal 2025, 1.32 times its net income of €9.6 billion.

How much does ASML spend on capital expenditures?

ASML spent €1.6 billion on capital expenditures in fiscal 2025, 4.8% of revenue, compared with €2.1 billion the year before.

How much stock does ASML buy back?

ASML spent €6.0 billion on net share repurchases in fiscal 2025.

How much does ASML pay in dividends?

ASML paid €2.6 billion in dividends in fiscal 2025, 23.0% of free cash flow.

Semiconductor Equipment & Materials: cash flow