Axcelis Technologies, Inc. (ACLS) Cash Flow Statement

NASDAQ: ACLSOperating cash, capex, free cash flow and buybacks.

Where ACLS’s cash came from and went, 2025

December 31, 2025 · U.S. dollars
Cash from operations
$118.3M
−16.0% vs 2024
Capital expenditures
$11.3M
1.3% of revenue
Free cash flow
$107.0M
12.8% margin
Returned to shareholders
$121.1M
113% of free cash flow
Change in cash
$21.9M
cash at year-end $145.5M
Cash from operations: $118.3MCash from operations$118.3MInvestments (net): $41.2MInvestments (net)$41.2MShare buybacks: $121.1MShare buybacks$121.1M · 76%Capital expenditures: $11.3MCapital expenditures$11.3M · 7%Added to cash: $21.9MAdded to cash$21.9M · 14%Other financing, Debt repayment, Currency & other: $5.2MOther uses$5.2M · 3%$159.5M
Cash from operations
$118.3M
Capital expenditures
−$11.3M
Investments (net)
+$41.2M
Share buybacks (net)
−$121.1M
Net borrowing (repayment)
−$1.4M
Other financing
−$2.1M
Currency & other
−$1.8M
Change in cash
$21.9M

Drawn to scale: where the cash came from and how it was used. Hover for values.

ACLS operating cash flow, capex and free cash flow

Operating cash flowCapital expendituresFree cash flowFCF margin (right axis)

ACLS cash flow trends, 2016–2025

Axcelis Technologies, Inc. cash flow trends
MetricTrendThenLatestChange
Operating cash flow−$8.8M2016$118.3M2025—
Capital expenditures$2.5M2016$11.3M2025+18.2%/yr
Free cash flow−$11.3M2016$107.0M2025—
Free cash flow margin−4.2%201612.8%2025+17.0 pts
Operating cash flow / net income−0.8020160.982025+1.78
Stock-based compensation$5.2M2016$20.8M2025+16.7%/yr
Dividends paid$02016$12023—
Share buybacks (net)$02016$121.1M2025—
Capex / revenue0.9%20161.3%2025+0.4 pts

Change is the average annual growth (CAGR) or the difference between the first and latest year.

ACLS cash flow by activity

OperatingInvestingFinancingChange in cash

ACLS net income vs operating cash flow

Net incomeOperating cash flow

Operating cash flow above net income usually means earnings are backed by cash (depreciation and stock-based pay are non-cash expenses).

ACLS cash flow statement

Axcelis Technologies, Inc. annual cash flow statement
2025202420232022202120202019201820172016
Operating activities
Net income$120.2M$201.0M$246.3M$183.1M$98.7M$50.0M$17.0M$45.9M$127.0M$11.0M
Depreciation & amortization$17.6M$15.8M$13.1M$11.6M$10.8M$9.9M$7.9M$5.8M$5.0M$4.3M
Stock-based compensation$20.8M$21.0M$18.3M$13.4M$12.1M$10.5M$8.2M$7.8M$5.7M$5.2M
Change in working capital−$30.9M−$85.4M−$97.2M−$11.6M$4.6M−$8.9M−$53.6M−$25.9M$8.9M−$30.7M
Other non-cash items−$9.5M−$11.5M−$23.5M$19.1M$24.0M$8.2M$6.9M$13.4M−$90.2M$1.4M
Cash from operating activities$118.3M$140.8M$156.9M$215.6M$150.2M$69.7M−$13.6M$47.0M$56.3M−$8.8M
Investing activities
Capital expenditures−$11.3M−$12.2M−$20.7M−$10.7M−$8.7M−$7.4M−$12.0M−$4.7M−$7.3M−$2.5M
Investments (net)$41.2M−$108.7M−$291.0M−$246.6M−$8.7M−$7.3M−$12.0M−$4.7M−$7.3M−$2.2M
Acquisitions & other investing$0$12.2M$210.8M$0$8.7M$7.4M$12.0M$4.7M$7.3M$2.5M
Cash from investing activities$29.9M−$108.7M−$100.9M−$257.3M−$8.7M−$7.3M−$12.0M−$4.7M−$7.3M−$2.2M
Financing activities
Dividends paid——−$1—−$4.9M−$9.4M——$0$0
Share repurchases & issuance (net)−$121.1M−$60.5M−$52.5M−$57.5M−$50.0M−$7.5M−$17.7M$2.6M$16.3M$2.5M
Net borrowing (repayment)−$1.4M−$1.5M−$1.2M−$987,000−$763,000−$399,000−$399,000−$1.4M−$1.2M−$74,000
Shares issued$0$0$0$0$0$0$0$0$0$0
Other financing−$2.1M−$9.2M−$14.5M−$7.0M$3.2M$14.9M$4.7M$0$0$0
Cash from financing activities−$124.5M−$71.2M−$68.3M−$65.5M−$52.5M−$2.4M−$13.4M$1.2M$15.1M$2.4M
Summary
Net change in cash$21.9M−$42.9M−$12.4M−$109.3M$91.4M$57.7M−$38.4M$44.0M$63.2M−$8.1M
Cash at end of period$145.5M$131.1M$174.0M$186.3M$295.7M$204.2M$146.5M$184.9M$140.9M$70.8M
Free cash flow$107.0M$128.6M$136.2M$204.9M$141.5M$62.3M−$25.6M$42.2M$49.0M−$11.3M
Free cash flow margin12.8%12.6%12.0%22.3%21.4%13.1%−7.5%9.5%11.9%−4.2%
Capex / revenue1.3%1.2%1.8%1.2%1.3%1.6%3.5%1.1%1.8%0.9%
Operating cash flow / net income0.980.700.641.181.521.39−0.801.020.44−0.80

Negative numbers are cash paid out. Quarterly columns are labeled by the month the quarter ended. Figures in U.S. dollars as reported; data from EODHD.

ACLS cash generation

In fiscal 2025 (ended December 31, 2025), Axcelis Technologies generated $118.3 million of cash from operations (down 16.0%) and spent $11.3 million on capital expenditures, leaving free cash flow of $107.0 million, 12.8% of revenue. It returned $121.1 million to shareholders through dividends ($0) and net share buybacks ($121.1 million). Cash and equivalents rose by $21.9 million over the year.

Related: ACLS income statement, ACLS balance sheet. See the ACLS stock overview for the latest quote and news.

ACLS cash flow FAQ

What is Axcelis Technologies's free cash flow?

Axcelis Technologies's free cash flow was $107.0 million in fiscal 2025: $118.3 million of operating cash flow minus $11.3 million of capital expenditures It was $128.6 million a year earlier..

How much cash does Axcelis Technologies generate from operations?

Axcelis Technologies generated $118.3 million of cash from operating activities in fiscal 2025, 0.98 times its net income of $120.2 million.

How much does Axcelis Technologies spend on capital expenditures?

Axcelis Technologies spent $11.3 million on capital expenditures in fiscal 2025, 1.3% of revenue, compared with $12.2 million the year before.

How much stock does Axcelis Technologies buy back?

Axcelis Technologies spent $121.1 million on net share repurchases in fiscal 2025.

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