MKS Instruments, Inc. (MKSI) Cash Flow Statement

NASDAQ: MKSIOperating cash, capex, free cash flow and buybacks.

Where MKSI’s cash came from and went, 2025

December 31, 2025 · U.S. dollars
Cash from operations
$645.0M
+22.2% vs 2024
Capital expenditures
$148.0M
3.8% of revenue
Free cash flow
$497.0M
12.6% margin
Returned to shareholders
$104.0M
21% of free cash flow
Change in cash
−$39.0M
cash at year-end $675.0M
Cash from operations: $645.0MCash from operations$645.0MDrawn from cash: $39.0MDrawn from cash$39.0MCurrency & other: $23.0MCurrency & other$23.0MAcquisitions & other: $3.0MAcquisitions & other$3.0MDebt repayment: $451.0MDebt repayment$451.0M · 64%Capital expenditures: $148.0MCapital expenditures$148.0M · 21%Dividends: $59.0MDividends$59.0M · 8%Share buybacks: $45.0MShare buybacks$45.0M · 6%Other financing: $7.0MOther financing$7.0M · 1%$710.0M
Cash from operations
$645.0M
Capital expenditures
−$148.0M
Acquisitions & other
+$3.0M
Dividends
−$59.0M
Share buybacks (net)
−$45.0M
Net borrowing (repayment)
−$451.0M
Other financing
−$7.0M
Currency & other
+$23.0M
Change in cash
−$39.0M

Drawn to scale: where the cash came from and how it was used. Hover for values.

MKSI operating cash flow, capex and free cash flow

Operating cash flowCapital expendituresFree cash flowFCF margin (right axis)

MKSI cash flow trends, 2016–2025

MKS Instruments, Inc. cash flow trends
MetricTrendThenLatestChange
Operating cash flow$180.1M2016$645.0M2025+15.2%/yr
Capital expenditures$19.1M2016$148.0M2025+25.5%/yr
Free cash flow$161.0M2016$497.0M2025+13.3%/yr
Free cash flow margin12.4%201612.6%2025+0.2 pts
Operating cash flow / net income1.7220162.192025+0.47
Stock-based compensation$25.2M2016$55.0M2025+9.0%/yr
Dividends paid$36.4M2016$59.0M2025+5.5%/yr
Share buybacks (net)$1.5M2016$45.0M2025+45.4%/yr
Capex / revenue1.5%20163.8%2025+2.3 pts

Change is the average annual growth (CAGR) or the difference between the first and latest year.

MKSI cash flow by activity

OperatingInvestingFinancingChange in cash

MKSI net income vs operating cash flow

Net incomeOperating cash flow

Operating cash flow above net income usually means earnings are backed by cash (depreciation and stock-based pay are non-cash expenses).

MKSI cash flow statement

MKS Instruments, Inc. annual cash flow statement
2025202420232022202120202019201820172016
Operating activities
Net income$295.0M$190.0M−$1.84B$333.0M$551.4M$350.1M$140.4M$392.9M$339.1M$104.8M
Depreciation & amortization$344.0M$348.0M$397.0M$216.0M$104.1M$99.2M$110.0M$79.9M$82.6M$65.9M
Stock-based compensation$55.0M$48.0M$54.0M$45.0M$36.7M$29.5M$49.2M$27.3M$24.4M$25.2M
Change in working capital$75.0M$4.0M−$99.0M−$157.0M−$71.5M$11.0M−$88.4M−$97.8M−$50.4M−$22.3M
Other non-cash items−$124.0M−$62.0M$1.81B$92.0M$18.8M$23.4M$33.3M$11.6M−$40.4M$6.5M
Cash from operating activities$645.0M$528.0M$319.0M$529.0M$639.5M$513.2M$244.5M$413.8M$355.2M$180.1M
Investing activities
Capital expenditures−$148.0M−$118.0M−$87.0M−$164.0M−$86.7M−$84.9M−$63.9M−$62.9M−$31.3M−$19.1M
Investments (net)—−$117.0M−$102.0M−$4.55B$150.5M−$117.5M$63.2M$135.7M$22.6M−$727.0M
Acquisitions & other investing$3.0M$118.0M$105.0M$164.0M−$268.4M$0−$946.5M$0$31.3M$19.1M
Cash from investing activities−$145.0M−$117.0M−$84.0M−$4.55B−$204.6M−$202.4M−$947.3M$72.8M$22.6M−$727.0M
Financing activities
Dividends paid−$59.0M−$59.0M−$59.0M−$52.0M−$47.6M−$44.0M−$43.5M−$42.4M−$38.2M−$36.4M
Share repurchases & issuance (net)−$45.0M$0$0——$0$0−$75.0M$0−$1.5M
Net borrowing (repayment)−$451.0M−$266.0M−$187.0M$4.03B−$14.2M−$56.8M$530.7M−$49.5M−$229.3M$598.5M
Shares issued$0$0$0$0$0$0$0$0$0$0
Other financing−$7.0M−$224.0M−$13.0M−$3.0M−$3.1M−$20.7M−$11.0M−$11.1M−$12.2M−$454,000
Cash from financing activities−$562.0M−$549.0M−$259.0M$3.97B−$64.9M−$121.5M$476.2M−$178.0M−$279.7M$560.1M
Summary
Net change in cash−$39.0M−$161.0M−$34.0M−$57.0M$358.0M$193.7M−$229.7M$310.5M$100.0M$6.3M
Cash at end of period$675.0M$714.0M$875.0M$909.0M$966.3M$608.3M$414.6M$644.3M$333.9M$233.9M
Free cash flow$497.0M$410.0M$232.0M$365.0M$552.8M$428.3M$180.6M$350.8M$323.9M$161.0M
Free cash flow margin12.6%11.4%6.4%10.3%18.7%18.4%9.5%16.9%16.9%12.4%
Capex / revenue3.8%3.3%2.4%4.6%2.9%3.6%3.4%3.0%1.6%1.5%
Operating cash flow / net income2.192.78—1.591.161.471.741.051.051.72

Negative numbers are cash paid out. Quarterly columns are labeled by the month the quarter ended. Figures in U.S. dollars as reported; data from EODHD.

MKSI cash generation

In fiscal 2025 (ended December 31, 2025), MKS Instruments generated $645.0 million of cash from operations (up 22.2%) and spent $148.0 million on capital expenditures, leaving free cash flow of $497.0 million, 12.6% of revenue. It returned $104.0 million to shareholders through dividends ($59.0 million) and net share buybacks ($45.0 million). Cash and equivalents fell by $39.0 million over the year.

Related: MKSI income statement, MKSI balance sheet, MKSI dividend history. See the MKSI stock overview for the latest quote and news.

MKSI cash flow FAQ

What is MKS Instruments's free cash flow?

MKS Instruments's free cash flow was $497.0 million in fiscal 2025: $645.0 million of operating cash flow minus $148.0 million of capital expenditures It was $410.0 million a year earlier..

How much cash does MKS Instruments generate from operations?

MKS Instruments generated $645.0 million of cash from operating activities in fiscal 2025, 2.19 times its net income of $295.0 million.

How much does MKS Instruments spend on capital expenditures?

MKS Instruments spent $148.0 million on capital expenditures in fiscal 2025, 3.8% of revenue, compared with $118.0 million the year before.

How much stock does MKS Instruments buy back?

MKS Instruments spent $45.0 million on net share repurchases in fiscal 2025.

How much does MKS Instruments pay in dividends?

MKS Instruments paid $59.0 million in dividends in fiscal 2025, 11.9% of free cash flow.

Scientific & Technical Instruments: cash flow